ANTARES® CX Advanced Cleaning System Maintenance
Course Length
7 days (at FSI's Chaska, Minnesota facility)
Class Size
Maximum of 6 students
Target Audience
Equipment maintenance technicians
Course Prerequisites
Basic knowledge from two years of experience or education in the following areas:
- Electronics (AC/DC circuits)
- Electricity - high voltage
- Mechanics
- Computer software navigation
- Ability to read electrical and pneumatic schematics
- Chemical safety training in a fab environment
- Familiarity with cleanroom procedures
- Fluency in English
- Understanding of MSDS forms
Course Objectives
Upon the successful completion of the ANTARES® System maintenance course, the attendee should be able to:
- Properly resource documentation for procedures, diagnostic analysis and specifications using FSI equipment operation and maintenance manual, supplementary training
- package and designated prints
- Properly perform operational control functions
- Demonstrate how to service the system
- Perform diagnostic analysis
- Perform corrective action on analysis
Course Description
The purpose of this maintenance course is to familiarize technicians with the theory, operation and service procedures for the ANTARES® System using the following:
- ANTARES® process module
- Wafer transfer module
- Cluster tool controller
- Process cluster support equipment
- Operation and maintenance manual
- Supplementary training package
- Designated prints
This instructor-led course provides technicians with an opportunity to acquire knowledge through lecture and equipment hands-on time
Registration and Cancellation Policies
Registration:
- Accepted on a first-come, first-served basis
- Paid via a Purchase Order number, training credits or a combination of both
- Made by calling 952.448.8025, filling out the On-Line Registration Request Form or e-mailing This e-mail address is being protected from spambots. You need JavaScript enabled to view it
Cancellation:
If cancellation is made by:
- 15 business days: no fee
- 11—15 business days: 25%
- 10 or less business days: 50%
- No cancellation (no show): 100%
Note: A minimum class size of four is required to hold a class. FSI reserves the right to cancel classes that do not meet the minimum size requirement and to reschedule attendees into the next available class. The attendee will be responsible for any costs due to travel arrangement changes/cancellations. Notifications of cancellations/changes will be made at least two weeks prior to start date.
General Information:
- Training is conducted in Chaska, Minnesota unless otherwise noted.
- Classes start promptly at 9:00 a.m. CST and end at approximately 5:00 p.m. CST.
- Credits purchased with system orders expire after the warranty period (approximately one year from date of shipment).
- Prices for all courses include training materials.
- Instruction of classes is presented in English.
